"Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term ..."

Kyotaro Nitta et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956496

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Kyotaro Nitta, Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu:
Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability. IEEE SENSORS 2019: 1-4

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