"Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback ..."

Alessandro Nastro, Marco Ferrari, Vittorio Ferrari (2021)

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DOI: 10.1109/SENSORS47087.2021.9639705

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type: Conference or Workshop Paper

metadata version: 2022-12-14

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Alessandro Nastro, Marco Ferrari, Vittorio Ferrari:
Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism. IEEE SENSORS 2021: 1-4

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