"An AlN-on-Si resonant IR sensor array with a large temperature coefficient ..."

Milad Moosavifar, Azadeh Ansari, Mina Rais-Zadeh (2016)

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DOI: 10.1109/ICSENS.2016.7808781

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Milad Moosavifar, Azadeh Ansari, Mina Rais-Zadeh:
An AlN-on-Si resonant IR sensor array with a large temperature coefficient of frequency. IEEE SENSORS 2016: 1-3

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