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"Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators."
Viphretuo Mere et al. (2020)
- Viphretuo Mere, Sudhanshu Tiwari, Aneesh Dash
, Rakshitha Kallega, Akshay Naik, Rudra Pratap, Shankar Kumar Selvaraja:
Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators. IEEE SENSORS 2020: 1-4
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