"Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with ..."

Kei Masunishi et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324992

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Kei Masunishi, Etsuji Ogawa, Daiki Ono, Fumito Miyazaki, Kengo Uchida, Jumpei Ogawa, Hideaki Murase, Fumitaka Ishibashi, Yasushi Tomizawa:
Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes. SENSORS 2023: 1-4

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