"Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive ..."

Xin Ma et al. (2021)

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DOI: 10.1109/SENSORS47087.2021.9639481

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-14

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  - https://dblp.org/rec/conf/ieeesensors/MaZGZW21
Xin Ma, Qi Zhang, Peng Guo, Yulong Zhao, Aiying Wang:
Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane. IEEE SENSORS 2021: 1-4

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