"A Novel MEMS Sensor with a Floating Cover Plate for Wall-Shear Stress ..."

Yunzhe Liu et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784469

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Yunzhe Liu, Lei Shi, Yunjian Chen, Shengming Ma, Kai Cheng, Chuqiao Wang, Xingxu Zhang, Jian Luo, Binghe Ma:
A Novel MEMS Sensor with a Floating Cover Plate for Wall-Shear Stress Measurement in the Harsh Supersonic Flow. IEEE SENSORS 2024: 1-4

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