"Vertical Integration of Pressure/Humidity/Temperature Sensors for ..."

Yung-Chian Lin et al. (2021)

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DOI: 10.1109/SENSORS47087.2021.9639781

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-14

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Yung-Chian Lin, Ya-Chu Lee, Chia-Hung Yang, Weileun Fang:
Vertical Integration of Pressure/Humidity/Temperature Sensors for CMOS-MEMS Environmental Sensing Hub. IEEE SENSORS 2021: 1-4

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