"A force-balanced negative feedback method for MEMS based electrochemical ..."

Guanglei Li et al. (2017)

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DOI: 10.1109/ICSENS.2017.8234176

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Guanglei Li, Junbo Wang, Deyong Chen, Zhenyuan Sun, Lianhong Chen, Jian Chen:
A force-balanced negative feedback method for MEMS based electrochemical seismic sensor. IEEE SENSORS 2017: 1-3

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