"A damping constant model for proof-mass structure design of MEMS inertial ..."

Toshifumi Konishi et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808793

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi:
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. IEEE SENSORS 2016: 1-3

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