"Design of a 2D MEMS micromirror with indirect static actuation."

Philip Kaupmann et al. (2017)

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DOI: 10.1109/ICSENS.2017.8234252

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Philip Kaupmann, Stefan Pinter, Jochen Franz, Reinhard Streiter, Thomas Otto:
Design of a 2D MEMS micromirror with indirect static actuation. IEEE SENSORS 2017: 1-3

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