"Development of a Micro Gas Sensor with a Suspended Micro Heater for Methyl ..."

Chia-Hsu Hsieh et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324959

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Chia-Hsu Hsieh, Chuan-Chun Liu, Yao-Ching Fang, Ya-Han Lin, Chun-Hsun Lin, I-Yu Huang:
Development of a Micro Gas Sensor with a Suspended Micro Heater for Methyl Mercaptan Gas Detection. SENSORS 2023: 1-4

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