"Ultrasensitive micromachined bulk acoustic wave resonators based vacuum ..."

Nishit Goel, Stephen Bart, Srinivas Tadigadapa (2017)

> Home

Details and statistics

DOI: 10.1109/ICSENS.2017.8234417

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ieeesensors/GoelBT17
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/GoelBT17
Nishit Goel, Stephen Bart, Srinivas Tadigadapa:
Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. IEEE SENSORS 2017: 1-3

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.