"MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for ..."

Muhannad Ghanam et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967300

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-06

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Muhannad Ghanam, Thomas Bilger, Frank Goldschmidtboeing, Peter Woias:
MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for High-Temperature Application. IEEE SENSORS 2022: 1-4

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