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"MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for ..."
Muhannad Ghanam et al. (2022)
- Muhannad Ghanam, Thomas Bilger, Frank Goldschmidtboeing, Peter Woias:
MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for High-Temperature Application. IEEE SENSORS 2022: 1-4
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