"Gas Sensor Based on Nonlinear Coupled AlN-Piezoelectric Micromachined ..."

Zhengliang Fang et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324875

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Zhengliang Fang, Stephanos Theodossiades, Nizar Jaber, Amal Z. Hajjaj:
Gas Sensor Based on Nonlinear Coupled AlN-Piezoelectric Micromachined Resonators. SENSORS 2023: 1-4

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