"Quality Factor Optimization and Thermal Noise Analysis of Silicon MEMS ..."

Zheng Fan et al. (2024)

> Home

Details and statistics

DOI: 10.1109/SENSORS60989.2024.10784948

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ieeesensors/FanLTWYTWM24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/FanLTWYTWM24
Zheng Fan, Zhu Li, Renguang Tang, Guanhua Wu, Shanqing Yang, Liang Cheng Tu, Yuan Wang, Pui-in Mak:
Quality Factor Optimization and Thermal Noise Analysis of Silicon MEMS Resonators. IEEE SENSORS 2024: 1-4

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.