"Electro-Mechanical Co-optimization of MEMS Devices in Python."

Rui Esteves et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278723

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Rui Esteves, Chen Wang, Joana Vaz Pinto, Michael Kraft:
Electro-Mechanical Co-optimization of MEMS Devices in Python. IEEE SENSORS 2020: 1-4

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