"Design, fabrication and characterization of a high performance MEMS ..."

Fatemeh Edalatfar et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808650

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Fatemeh Edalatfar, Bahareh Yaghootkar, Abdul Qader Ahsan Qureshi, Soheil Azimi, Behraad Bahreyni:
Design, fabrication and characterization of a high performance MEMS accelerometer. IEEE SENSORS 2016: 1-3

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