"Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro ..."

Wenhao Chen et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967132

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-13

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Wenhao Chen, Mingzheng Duan, Hadi Tavakkoli, Huahuang Luo, Bin Zhao, Wibool Piyawattanametha, Yi-Kuen Lee:
Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners. IEEE SENSORS 2022: 1-4

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