"Challenges of monolithic integration for SiGe MEMS technology."

Ashesh Ray Chaudhuri et al. (2016)

> Home

Details and statistics

DOI: 10.1109/ICSENS.2016.7808583

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-20

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ieeesensors/ChaudhuriSHFT16
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/ChaudhuriSHFT16
Ashesh Ray Chaudhuri, Simone Severi, Philippe Hélin, Laurent A. Francis, Harrie A. C. Tilmans:
Challenges of monolithic integration for SiGe MEMS technology. IEEE SENSORS 2016: 1-3

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.