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"Theoretical and experimental study of ScAlN/Sapphire structure based SAW ..."
Florian Bartoli et al. (2017)
- Florian Bartoli, Mohammed Moutaouekkil, Jérémy Streque
, Philippe Pigeat, Sami Hage-Ali
, Pascal Boulet
, Hamid M'Jahed, Omar Elmazria
, Sergei Zhgoon, Thierry Aubert
, Olivier Bou Matar, Abdelkrim Talbi
:
Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor. IEEE SENSORS 2017: 1-3
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