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"MEMS stiction supression with sacrificial polystyrene nanoparticles."
Aishwaryadev Banerjee, Shashank S. Pandey, Carlos H. Mastrangelo (2017)
- Aishwaryadev Banerjee, Shashank S. Pandey, Carlos H. Mastrangelo:
MEMS stiction supression with sacrificial polystyrene nanoparticles. IEEE SENSORS 2017: 1-3
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