"Investigating the piezoelectric response of Mg-Ti-doped-AlN thin films for ..."

Sri Ayu Anggraini et al. (2017)

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DOI: 10.1109/ICSENS.2017.8233943

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Sri Ayu Anggraini, Masato Uehara, Hiroshi Yamada, Morito Akiyama:
Investigating the piezoelectric response of Mg-Ti-doped-AlN thin films for sensor application. IEEE SENSORS 2017: 1-3

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