"Nano-precision micromachined frequency output profilometer."

Amin Abbasalipour et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808884

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Amin Abbasalipour, Mohammad Mahdavi, Varun Kumar, Siavash Pourkamali, Soheil Daryadel, Majid Minary:
Nano-precision micromachined frequency output profilometer. IEEE SENSORS 2016: 1-3

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