"A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement."

Chengxiang Wang et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278897

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-13

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  - https://dblp.org/rec/conf/ieeesensors/0005WHKZWX20
Chengxiang Wang, Yulie Wu, Zhanqiang Hou, Yunbin Kuang, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao:
A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement. IEEE SENSORS 2020: 1-4

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