"A Parallel Inverse-Model-Based Iterative Learning Control Method for a ..."

Weike Liu et al. (2020)

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DOI: 10.1109/IECON43393.2020.9254477

access: closed

type: Conference or Workshop Paper

metadata version: 2024-12-09

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Weike Liu, Runze Ding, Xiaofeng Yang, Chenyang Ding, Feng Shu:
A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner. IECON 2020: 41-46

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