"Service-based Semiconductor Manufacturing using the Digital Reference ..."

Hartwig Baumgärtel et al. (2020)

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DOI: 10.1109/IECON43393.2020.9254292

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type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hartwig Baumgärtel, Patrick Moder, Nour Ramzy, Hans Ehm:
Service-based Semiconductor Manufacturing using the Digital Reference Ontology for Global Service Discovery. IECON 2020: 4533-4540

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