"Accurate 3DIC thermal simulation for BEOL influence study."

Hao Yang et al. (2022)

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DOI: 10.1109/ICTA56932.2022.9963005

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-16

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Hao Yang, Bin Yan, Jianjun Sur, Jian Pang, Guanavao Li, Ouvana Keqing, Shuaiana Zhang:
Accurate 3DIC thermal simulation for BEOL influence study. ICTA 2022: 17-19

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