"Mismatch of nonlinear stiffness in differential MEMS resonating sensors ..."

Haochen Wu et al. (2021)

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DOI: 10.1109/ICTA53157.2021.9661650

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-06

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Haochen Wu, Xilong Shen, Hailong Ma, Chencheng Yu, Jian Zhao:
Mismatch of nonlinear stiffness in differential MEMS resonating sensors and its self-test and calibration technique. ICTA 2021: 195-196

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