"Moiré-Based Nanoprecision Bonding Alignment System for Hybrid ..."

Xiaoyun Qi et al. (2021)

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DOI: 10.1109/ICTA53157.2021.9661731

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-06

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Xiaoyun Qi, Han Yan, Shicheng Zhou, Qiushi Kang, Chenxi Wang:
Moiré-Based Nanoprecision Bonding Alignment System for Hybrid Integration. ICTA 2021: 24-26

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