"Patterning of Monolithic Integrated Circuit using Electron Beam Lithography."

Raudah Abu Bakar, Harnani Hassan, Sukreen Hana Herman (2023)

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DOI: 10.1109/ICSET59111.2023.10295127

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-13

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Raudah Abu Bakar, Harnani Hassan, Sukreen Hana Herman:
Patterning of Monolithic Integrated Circuit using Electron Beam Lithography. ICSET 2023: 319-323

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