"Run To Run control based on categorical output in semiconductor manufacturing."

El Mostafa El Adel et al. (2016)

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DOI: 10.1109/ICOSC.2016.7507083

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton:
Run To Run control based on categorical output in semiconductor manufacturing. ICSC 2016: 180-185

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