"Design and fabrication of a novel compliant rotary nanopositioning stage."

Qingsong Xu (2013)

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DOI: 10.1109/ICRA.2013.6630756

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-02

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Qingsong Xu:
Design and fabrication of a novel compliant rotary nanopositioning stage. ICRA 2013: 1415-1420

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