"Calibration of single-axis nanopositioning cell subjected to thermal ..."

Ning Tan, Cédric Clévy, Nicolas Chaillet (2013)

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DOI: 10.1109/ICRA.2013.6631091

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-04

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Ning Tan, Cédric Clévy, Nicolas Chaillet:
Calibration of single-axis nanopositioning cell subjected to thermal disturbance. ICRA 2013: 3660-3665

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