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"Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks."
John W. Suh et al. (2000)
- John W. Suh, R. Bruce Darling, Karl-Friedrich Böhringer, Bruce Randall Donald, Henry Baltes, Gregory T. A. Kovacs:
Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks. ICRA 2000: 1101-1108
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