"Pick and Place Operation of a Micro Object with High Reliability and ..."

Shigeki Saito, Hideki Miyazaki, Tomomasa Sato (1999)

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DOI: 10.1109/ROBOT.1999.774011

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Shigeki Saito, Hideki Miyazaki, Tomomasa Sato:
Pick and Place Operation of a Micro Object with High Reliability and Precision Based on Micro Physics Under SEM. ICRA 1999: 2736-2743

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