"A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab ..."

Jonghun Park et al. (2001)

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DOI: 10.1109/ROBOT.2001.932872

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-10

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Jonghun Park, Spyros A. Reveliotis, Douglas A. Bodner, Chen Zhou, Leon F. McGinnis:
A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab Controllers. ICRA 2001: 1813-1819

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