"Millimeter-scale microrobots for wafer-level factories."

Rakesh Murthy, Dan O. Popa (2010)

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DOI: 10.1109/ROBOT.2010.5509795

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Rakesh Murthy, Dan O. Popa:
Millimeter-scale microrobots for wafer-level factories. ICRA 2010: 488-493

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