"A preliminary study of automated inspection of VLSI resist patterns."

Ching-Chung Li et al. (1985)

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DOI: 10.1109/ROBOT.1985.1087244

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-20

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Ching-Chung Li, J. F. Mancuso, David B. Shu, Yung-Nien Sun, L. D. Roth:
A preliminary study of automated inspection of VLSI resist patterns. ICRA 1985: 474-480

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