"Micro Object Handling Under SEM by Vision-Based Automatic Control."

Takeshi Kasaya et al. (1999)

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DOI: 10.1109/ROBOT.1999.770431

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Takeshi Kasaya, Hideki Miyazaki, Shigeki Saito, Tomomasa Sato:
Micro Object Handling Under SEM by Vision-Based Automatic Control. ICRA 1999: 2189-2196

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