"The Modeling and Control of the Cluster Tool in Semiconductor Fabrication."

Han-Pang Huang, Che-Lung Wang (2001)

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DOI: 10.1109/ROBOT.2001.932874

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Han-Pang Huang, Che-Lung Wang:
The Modeling and Control of the Cluster Tool in Semiconductor Fabrication. ICRA 2001: 1826-1831

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