"Design and control of an air-bearing supported three degree-of-freedom ..."

Robert Hammer et al. (1992)

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DOI: 10.1109/ROBOT.1992.220289

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Robert Hammer, Ralph L. Hollis, C. H. An, F. Henriks:
Design and control of an air-bearing supported three degree-of-freedom fine positioner. ICRA 1992: 677-684

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