"Nanometer-Scale Height Measurements in Micromachined Picoliter Vials Based ..."

L. R. Van den Doel et al. (2000)

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DOI: 10.1109/ICPR.2000.903485

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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L. R. Van den Doel, Lucas J. van Vliet, K. T. Hjelt, Michael J. Vellekoop, Ian T. Young, F. Gromball, Jan G. Korvink:
Nanometer-Scale Height Measurements in Micromachined Picoliter Vials Based on Interference Fringe Analysis. ICPR 2000: 3057-3062

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