"Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning."

Anahid N. Jalali et al. (2019)

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DOI: 10.1109/ICPHM.2019.8819404

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-04

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  - https://dblp.org/rec/conf/icphm/JalaliHSHNGSB19
Anahid N. Jalali, Clemens Heistracher, Alexander Schindler, Bernhard Haslhofer, Tanja Nemeth, Robert Glawar, Wilfried Sihn, Peter De Boer:
Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. ICPHM 2019: 1-8

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