"Process Control and Management of Etching Process Using Data Mining with ..."

Hyeon Bae, Sungshin Kim, Kwang Bang Woo (2005)

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DOI: 10.1007/11539087_154

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Hyeon Bae, Sungshin Kim, Kwang Bang Woo:
Process Control and Management of Etching Process Using Data Mining with Quality Indexes. ICNC (1) 2005: 1160-1169

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