"Fabrication Processes for Packaged Optical MEMS Devices."

Scott Samson et al. (2005)

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DOI: 10.1109/ICMENS.2005.50

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Scott Samson, Rahul Agarwal, Sunny Kedia, Weidong Wang, Shinzo Onishi, John Bumgarner:
Fabrication Processes for Packaged Optical MEMS Devices. ICMENS 2005: 113-120

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