"Closed Loop Micromanipulators for Optical Metrology."

L. Ngo Phong et al. (2004)

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DOI: 10.1109/ICMENS.2004.1508985

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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L. Ngo Phong, J. Lee, I. Ressejac, M. Maszkiewicz, W. Zheng, S. Crisan, Loïc Le Noc, Francis Picard, Hubert Jerominek:
Closed Loop Micromanipulators for Optical Metrology. ICMENS 2004: 414-420

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