"Optical MEMS pressure sensor using ring resonator on a circular diaphragm."

Prasant Kumar Pattnaik et al. (2005)

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DOI: 10.1109/ICMENS.2005.94

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Prasant Kumar Pattnaik, Bh. Vijayaaditya, T. Srinivas, A. Selvarajan:
Optical MEMS pressure sensor using ring resonator on a circular diaphragm. ICMENS 2005: 277-280

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