"A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and ..."

Zhishan Hua et al. (2004)

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DOI: 10.1109/ICMENS.2004.1508917

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Zhishan Hua, Onnop Srivannavit, Yongmei Xia, Erdogan Gulari:
A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and Pneumatic Actuation. ICMENS 2004: 72-76

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