"Picometer-Scale Positioning of a Linear Drive System via ..."

Alex S. Huaman et al. (2021)

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DOI: 10.1109/ICM46511.2021.9385699

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Alex S. Huaman, Michael Katzschmann, Steffen Hesse, Christoph Schäffel, Christoph Weise, Denis Dontsov, Eberhard Manske, Johann Reger:
Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control. ICM 2021: 1-6

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